Touch display device

ABSTRACT

A touch display device is provided in this disclosure. The touch display device includes a substrate, a first conductive layer, a second conductive layer, a stacked structure, an inorganic light emitting unit, and a touch sensing circuit. The first conductive layer is disposed on the substrate. The first conductive layer includes a gate electrode. The second conductive layer is disposed on the first conductive layer. The second conductive layer includes a source electrode and a drain electrode. The stacked structure is disposed on the substrate. The staked structure includes a conductive channel and a sensing electrode. The inorganic light emitting unit is disposed on the stacked structure. The inorganic light emitting unit is electrically connected with the drain electrode via the conductive channel. The touch sensing circuit is electrically connected with the sensing electrode.

BACKGROUND OF THE DISCLOSURE 1. Field of the Disclosure

The present disclosure relates to a touch display device, and moreparticularly, to an in-cell type touch display device.

2. Description of the Prior Art

The overall thickness of the touch display device with a touch displaypanel, such as an out-cell touch display panel, will be increasedbecause the touch sensing units are formed on an independent touchpanel. Therefore, there is still a need to reduce the overall thicknessof the touch display device.

SUMMARY OF THE DISCLOSURE

One of the objectives of the present disclosure is to provide a touchdisplay device. Parts with touch sensing functions are integrated into aself-luminant display device. The purposes of thickness reduction,process integration, and/or production cost reduction may be achievedaccordingly.

A touch display device is provided in an embodiment of the presentdisclosure. The touch display device includes a substrate, a firstconductive layer, a second conductive layer, a stacked structure, aninorganic light emitting unit, and a touch sensing circuit. The firstconductive layer is disposed on the substrate. The first conductivelayer includes a gate electrode. The second conductive layer is disposedon the first conductive layer. The second conductive layer includes asource electrode and a drain electrode. The stacked structure isdisposed on the substrate. The staked structure includes a conductivechannel and a sensing electrode. The inorganic light emitting unit isdisposed on the stacked structure. The inorganic light emitting unit iselectrically connected with the drain electrode via the conductivechannel. The touch sensing circuit is electrically connected with thesensing electrode.

These and other objectives of the present disclosure will no doubtbecome obvious to those of ordinary skill in the art after reading thefollowing detailed description of the embodiment that is illustrated inthe various figures and drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic diagram illustrating a partial cross-sectionalstructure of a touch display device according to a first embodiment ofthe present disclosure.

FIG. 2 is a schematic diagram illustrating a top view of the touchdisplay device according to the first embodiment of the presentdisclosure.

FIG. 3 is a schematic diagram illustrating allocations of a touchsensing circuit and sensing lines in the touch display device accordingto the first embodiment of the present disclosure.

FIG. 4 is a schematic diagram illustrating allocations of a touchsensing circuit and sensing lines in the touch display device accordingto another embodiment of the present disclosure.

FIG. 5 is a schematic diagram illustrating partial allocations ofsensing electrodes and sensing lines in the touch display deviceaccording to another embodiment of the present disclosure.

FIG. 6 is a schematic circuit diagram of a control unit in the touchdisplay device according to the first embodiment of the presentdisclosure.

FIG. 7 is a schematic timing diagram of an operation method of a touchdisplay device according to an embodiment of the present disclosure.

FIG. 8 is a schematic timing diagram of an operation method of a touchdisplay device according to another embodiment of the presentdisclosure.

FIG. 9 is a schematic timing diagram of a touch sensing signal in anoperation method of a touch display device according to an embodiment ofthe present disclosure.

FIG. 10 is a schematic diagram illustrating a partial cross-sectionalstructure of a touch display device according to a second embodiment ofthe present disclosure.

FIG. 11 is a schematic diagram illustrating a top view of the touchdisplay device according to the second embodiment of the presentdisclosure.

FIG. 12 is a schematic diagram illustrating a partial cross-sectionalstructure of the touch display device according to the second embodimentof the present disclosure.

FIG. 13 is a schematic diagram illustrating a partial cross-sectionalstructure of a touch display device according to a third embodiment ofthe present disclosure.

FIG. 14 is a schematic diagram illustrating a partial cross-sectionalstructure of a touch display device according to a fourth embodiment ofthe present disclosure.

FIG. 15 is a schematic diagram illustrating a partial cross-sectionalstructure of a touch display device according to a fifth embodiment ofthe present disclosure.

FIG. 16 is a schematic diagram illustrating a partial cross-sectionalstructure of a touch display device according to a sixth embodiment ofthe present disclosure.

FIG. 17 is a schematic diagram illustrating a partial cross-sectionalstructure of a touch display device according to a seventh embodiment ofthe present disclosure.

FIG. 18 is a schematic diagram illustrating a partial cross-sectionalstructure of a touch display device according to an eighth embodiment ofthe present disclosure.

FIG. 19 is a schematic diagram illustrating a partial cross-sectionalstructure of a touch display device according to a ninth embodiment ofthe present disclosure.

FIG. 20 is a schematic diagram illustrating a partial cross-sectionalstructure of a touch display device according to a tenth embodiment ofthe present disclosure.

FIG. 21 is a schematic diagram illustrating a partial cross-sectionalstructure of a touch display device according to an eleventh embodimentof the present disclosure.

FIG. 22 is a schematic diagram illustrating a partial cross-sectionalstructure of a touch display device according to a twelfth embodiment ofthe present disclosure.

DETAILED DESCRIPTION

Certain terms are used throughout the description and following claimsto refer to particular components. As one skilled in the art willunderstand, equipment manufacturers may refer to a component bydifferent names. This document does not intend to distinguish betweencomponents that differ in names but not function. In the followingdescription and in the claims, the terms “have”, “include” and“comprise” are used in an open-ended fashion, and thus should beinterpreted to mean “include, but not limited to . . . ”.

It will be understood that when an element or layer is referred to asbeing “on” or “connected with” another element or layer, it can bedirectly on or directly connected with another element or layer, orintervening elements or layers may be presented therebetween. Incontrast, when an element is referred to as being “directly on” or“directly connected with” another element or layer, there are nointervening elements or layers presented.

The ordinal numbers, such as “first”, “second”, etc., used in thedescription and the claims are used to modify the elements in the claimsand do not themselves imply and represent that the claim has anyprevious ordinal number, do not represent the sequence of the claimedelements, and do not represent the sequence of the manufacturingmethods. These ordinal numbers are only used to make a claimed elementwith a certain name clear from another claimed element with the samename.

In this disclosure, the terms, such as “about”, “around”, “roughly”,“approximately”, “practically”, and “substantially”, are usuallyexpressed within a range of 20%, or within a range of 10%, or within arange of 5%, or within a range of 3%, or within a range of 2%, or withina range of 1%, or within a range of 0.5% of a given value. The givenamount is a roughly amount. That is, in the absence of specificdescriptions of “about”, “around”, “roughly”, “approximately”,“practically”, and “substantially”, it can still be implied such as“about”, “around”, “roughly”, “approximately”, “practically”, and“substantially”.

It should be understood that embodiments are described below toillustrate different technical features, but these technical featuresmay be mixed to be used or combined with one another in different wayswithout conflicting with one another.

Please refer to FIGS. 1-5. FIG. 2 is a schematic diagram illustrating atop view of a touch display device in this embodiment, FIG. 1 is aschematic diagram illustrating a partial cross-sectional structure takenalong a cross-sectional line A-A′ in FIG. 2 according to thisembodiment, FIG. 3 is a schematic diagram illustrating allocations of atouch sensing circuit and sensing lines in the touch display deviceaccording to this embodiment, FIG. 4 is a schematic diagram illustratingallocations of a touch sensing circuit and sensing lines in the touchdisplay device according to another embodiment of the presentdisclosure, and FIG. 5 is a schematic diagram illustrating partialallocations of sensing electrodes and the sensing lines in the touchdisplay device according to this embodiment. As shown in FIGS. 1-3, atouch display device 101 is provided in this embodiment. The touchdisplay device 101 includes a substrate 10, a first conductive layer 18,a second conductive layer 22, a stacked structure LS, and an inorganiclight emitting unit 42. The first conductive layer 18 is disposed on thesubstrate 10, and the first conductive layer 18 includes a gateelectrode 18G The second conductive layer 22 is disposed on the firstconductive layer 18, and the second conductive layer 22 includes asource electrode 22S and a drain electrode 22D, but the location wherethe second conductive layer 22 is disposed is not limited to thelocation shown in FIG. 1. In some embodiments, the electrode 22S may bea drain electrode, and the electrode 22D may be a source electrode. Thestacked structure LS is disposed on the substrate 10, and the stakedstructure LS includes a conductive channel CS and a sensing electrodeSE. The inorganic light emitting unit 42 is disposed on the stackedstructure LS, and the inorganic light emitting unit 42 is electricallyconnected with the drain electrode 22D via the conductive channel CS.

The substrate 10 may have two opposite sides (such as a first side S1and a second side S2 shown in FIG. 1) in a thickness direction Z (i.e.the normal direction of the substrate 10), and each part in the touchdisplay device may be disposed on and/or near the first side S1 or thesecond side S2 of the substrate 10 according to the demands. In someembodiments, the touch display device 101 may further include asemiconductor layer 14 and a gate dielectric layer 16 disposed on and/ornear the first side S1 of the substrate 10, and the semiconductor layer14, the gate dielectric layer 16, the gate electrode 18Q the sourceelectrode 22S, and the drain electrode 22D may constitute a thin filmtransistor (such as a first transistor T1 shown in FIG. 1), but notlimited thereto. In some embodiments, a buffer layer 12 may be formed onand/or near the first side S1 of the substrate 10 before the step offorming the semiconductor layer 14, and the semiconductor layer 14 maybe formed on the buffer layer 12. Subsequently, the gate dielectriclayer 16 may be formed on the semiconductor layer 14, and the firstconductive layer 18 may be formed on the gate dielectric layer 16. Afirst dielectric layer 20 may then be formed to cover at least a part ofthe gate dielectric layer 16 and at least a part of the first conductivelayer 18, and at least a part of the second conductive layer 22 may beformed on the first dielectric layer 20, but not limited thereto. Insome embodiments, a source doped region 14S and a drain doped region 14Dmay be formed in the semiconductor layer 14. The source electrode 22Sand the drain electrode 22D may be formed on and electrically connectedwith the source doped region 14S and the drain doped region 14Drespectively. For example, after forming the first dielectric layer 20,an opening penetrating the first dielectric layer 20 and the gatedielectric layer 16 above the source doped region 14S and an openingpenetrating the first dielectric layer 20 and the gate dielectric layer16 above the drain doped region 14D may be formed, and the sourceelectrode 22S and the drain electrode 22D may be partly formed in theopenings for contacting and being electrically connected with the sourcedoped region 14S and the drain doped region 14D respectively. The firsttransistor T1 shown in FIG. 1 may be regarded as a top-gate transistorstructure, and the first transistor T1 in the present disclosure is notlimited to this structure. The first transistor T1 may have othersuitable types of transistor structures (such as a bottom-gatetransistor structure, a dual-gate transistor structure, a multi-gatetransistor structure, etc.), and the manufacturing sequence of the firstconductive layer 18 and the second conductive layer 22, and the relativedispositions of the gate electrode 18G the source electrode 22S, and thedrain electrode 22D may be modified accordingly.

As shown in FIG. 1 and FIG. 2, in some embodiments, the first transistorT1 may be at least a part of a control unit CU corresponding to theinorganic light emitting unit 42. For example, the control unit CU maybe a 2T1C (two transistors and one capacitor) structure, a 3T1C (threetransistors and one capacitor) structure, or other suitable circuitcompositions including a transistor. The touch display device 101 mayinclude a plurality of the control units CU arranged in an arrayconfiguration, and each of the control units CU may be disposedcorresponding to one or more inorganic light emitting units 42, but notlimited thereto. In some embodiments, the inorganic light emitting units42 may include a first inorganic light emitting unit 42A, a secondinorganic light emitting unit 42B, and a third inorganic light emittingunit 42C configured to emit light of different colors (such as redlight, green light, and blue light) respectively, but not limitedthereto. Additionally, the touch display device 101 may include aplurality of gate lines GL, a plurality of data lines DL disposedcrossing one another, and each of the control units CU may beelectrically connected with the gate line GL and the data line DLcorresponding to the control unit CU. In some embodiments, the gatelines GL and the gate electrode 18G may be formed of an identicalconductive layer (such as the first conductive layer 18), and the datalines DL, the source electrode 22S, and the drain electrode 22D may beformed of another identical conductive layer (such as the secondconductive layer), but not limited thereto.

In the touch display device 101, the stacked structure LS including theconductive channel CS and the sensing electrode SE may be disposed onand/or near the first side S1 of the substrate 10, but the presentdisclosure is not limited to this. In some embodiments, the stackedstructure LS may be disposed on and/or near the second side S2 of thesubstrate 10 according to some demands, or the stacked structure LS maybe partly disposed on and/or near the first side S1 of the substrate 10and partly disposed on and/or near the second side S2 of the substrate10 according to some demands. In some embodiments, the touch displaydevice 101 may further include a second dielectric layer 24 covering thefirst transistor T1, and at least a part of the stacked structure LS maybe disposed on the second dielectric layer 24. For example, theconductive channel CS may include a first portion 26A of a thirdconductive layer 26, a first portion 30A of a fourth conductive layer30, and a first portion 34A of a fifth conductive layer 34 stacked inthe thickness direction Z of the substrate 10 and electrically connectedwith one another, but not limited thereto. In other words, theconductive channel CS may include a multi-layer stacked structure. Forexample, the conductive channel CS may include a first layer (such asthe first portion 30A of the fourth conductive layer 30 described above)and a second layer (such as the first portion 34A of the fifthconductive layer 34 described above). The second layer is disposed onthe first layer, and the sensing electrode SE and one of the first layeror the second layer may be formed of the identical layer. For example,the sensing electrode SE may be formed of another portion of the fifthconductive layer 34, and the sensing electrode SE and the first portion34A of the fifth conductive layer 34 in the conductive channel CS may beformed of the identical layer accordingly. In addition, the touchdisplay device 101 may further include a sensing line TL disposed underthe sensing electrode SE, and the sensing line TL is electricallyconnected with the sensing electrode SE. In some embodiments, thesensing line TL may be formed of another portion of the fourthconductive layer 30, but not limited thereto.

Specifically, in some embodiments, the first portion 26A of the thirdconductive layer 26 may be partly disposed on the second dielectriclayer 24 and partly disposed in an opening penetrating the seconddielectric layer 24 for being electrically connected with the drainelectrode 22D. The first portion 30A of the fourth conductive layer 30may be partly disposed on a planarization layer 28 and partly disposedin an opening penetrating the planarization layer 28 for beingelectrically connected with the first portion 26A of the thirdconductive layer 26, and the sensing line TL may be disposed on theplanarization layer 28. The first portion 34A of the fifth conductivelayer 34 may be partly disposed on a third dielectric layer 32 andpartly disposed in an opening penetrating the third dielectric layer 32for being electrically connected with the first portion 30A of thefourth conductive layer 30, and the sensing electrode SE may be disposedon the third dielectric layer 32. In some embodiments, the touch displaydevice 101 may further include a pixel defining layer (PDL) 36 disposedon the third dielectric layer 32 for defining a plurality of pixelregions PX, and each of the inorganic light emitting units 42 may bedisposed in the corresponding pixel region, but not limited thereto.Specifically, in some embodiments, the touch display device 101 mayfurther include a fourth dielectric layer 38 disposed on the pixelregions described above and disposed between the inorganic lightemitting unit 42 and the conductive channel CS, and a first contact pad40A may be disposed in the fourth dielectric layer 38 for electricallyconnecting the conductive channel CS and the inorganic light emittingunit 42. Additionally, in some embodiments, the sensing electrode SE maybe electrically connected with the inorganic light emitting unit 42. Forexample, the sensing electrode SE may be electrically connected with theinorganic light emitting unit 42 via a second contact pad 40B disposedin the fourth dielectric layer 38, and the first contact pad 40A and thesecond contact pad 40B may include and be formed of the same conductivematerial, but not limited thereto. In some embodiments, the firstcontact pad 40A may include a conductive material different from aconductive material of the second contact pad 40B.

In some embodiments, the substrate 10 may be a rigid substrate or aflexible substrate, and the material of the substrate 10 may include aglass substrate, a plastic substrate, a ceramic substrate, polyimide(PI), polyethylene terephthalate (PET), other suitable materials, or asubstrate made of a combination of the materials described above. Thebuffer layer 12 may be a single layer or multiple layers of dielectricmaterials, such as silicon oxide, silicon nitride, silicon oxynitride,etc., but not limited thereto. The semiconductor layer 14 may include asemiconductor material containing silicon (such as polysilicon, singlecrystal silicon, etc.), an oxide semiconductor material (such as indiumgallium zinc oxide, zinc oxide, etc.), or other suitable types ofsemiconductor materials. The gate dielectric layer 16 may includesilicon oxide, silicon nitride, silicon oxynitride, aluminum oxide,hafnium oxide, or other suitable dielectric materials. The firstconductive layer 18, the second conductive layer 22, the thirdconductive layer 26, the fourth conductive layer 30, the fifthconductive layer 34, the first contact pad 40A, and the second contactpad 40B may respectively include a metallic conductive material, atransparent conductive material, other suitable types of conductivematerials, or a combination of the materials described above. Forexample, the metallic conductive material described above may include atleast one of aluminum, copper, silver, chromium, titanium, ormolybdenum, a composite layer of the materials described above, an alloyof the materials described above, and the transparent conductivematerial described above may include indium tin oxide, indium zincoxide, or aluminum zinc oxide, but not limited thereto. The firstdielectric layer 20, the second dielectric layer 24, and the thirddielectric layer 32 may respectively include a single layer or multiplelayers of dielectric materials, such as silicon oxide, silicon nitride,silicon oxynitride, etc., but not limited thereto. The planarizationlayer 28 and the pixel defining layer 36 may respectively include anorganic dielectric material, such as acrylic resin and siloxane resin,other suitable dielectric materials, or a combination of the materialsdescribed above. The fourth dielectric layer 38 may include an opticalclear adhesive (OCA), an optical clear resin (OCR), or other suitabledielectric materials. The inorganic light emitting unit 42 may include alight emitting diode (LED) unit, such as a mini-LED unit, a micro-LEDunit, a quantum dot LED (QD-LED) unit module, other suitable types ofinorganic light emitting units, or a combination of the light emittingunits described above.

As shown in FIGS. 1-3, in some embodiments, the touch display device 101may further include a touch sensing circuit 91. The touch sensingcircuit 91 is electrically connected with the sensing electrode SE fortransmitting signals to the sensing electrode SE and/or receivingsignals from the sensing electrode SE. In some embodiments, the touchsensing circuit 91 may be implemented by a chip on glass (COG) approach,a chip on film (COF) approach, or other suitable types of touch sensingcircuits. In other words, the touch sensing circuit 91 may be disposedon and/or near the first side S1 of the substrate 10 and/or be disposedon and/or near the second side S2 of the substrate 10 according to somedemands, or the touch sensing circuit 91 may be disposed on a flexiblecircuit board without being disposed on the substrate 10. Additionally,in some embodiments, the touch sensing circuit 91 may be integrated intoan integrated circuit 90, and the integrated circuit 91 may beconfigured to control the touch sensing function and the displayfunction in the touch display device 101, but not limited thereto. Forexample, the touch sensing circuit 91 integrated in the integratedcircuit 90 may be electrically connected with the sensing electrode SEvia the sensing line TL, and the integrated circuit 90 may be alsoelectrically connected with the data lines DL described above forcontrolling the operation condition of the control units CU describedabove. In some embodiments, the data lines DL may be disposed at themiddle position, and the sensing lines TL may be disposed at two sidesof the data lines DL, but not limited thereto. For example, the sensinglines TL and the data lines DL may be disposed alternately, as shown inFIG. 4.

As shown in FIG. 1 and FIG. 2, in some embodiments, sizes and ranges ofthe sensing electrodes SE may be modified according to some designrequirements (such as the arrangement and the distribution density), andthe sensing electrode SE may partly overlap the data line DL and/or thegate line GL in the thickness direction Z of the substrate 10, but notlimited thereto. The sensing electrodes SE may be applied in a touchsensing approach, such as a self-capacitive touch sensing approach, amutual capacitive touch sensing approach, or other suitable types oftouch sensing approaches. Additionally, as shown in FIG. 1, FIG. 2, andFIG. 5, in some embodiments, the sensing electrode SE may include a slitH, and the slit H may overlap at least a part of the sensing line TL inthe thickness direction Z of the substrate 10. The area of a regionwhere the sensing line TL overlaps the sensing electrode SE may bereduced by disposing the slit H in the sensing electrode SE, and theloading effect generated by the sensing line TL on the sensing electrodeSE may be reduced or the touch sensing operation and/or the displayoperation may be improved accordingly.

Please refer to FIG. 6, FIG. 1, and FIG. 2. FIG. 6 is a schematiccircuit diagram of the control unit CU in the touch display device 101according to this embodiment. As shown in FIG. 1, FIG. 2, and FIG. 6,the control unit CU in this embodiment may be a 3T1C structure andinclude the first transistor aforementioned T1, a second transistor T2,a third transistor T3, and a storage capacitor Cst. A gate electrode ofthe third transistor T3 may be electrically connected with the gate lineGL. A source electrode of the third transistor T3 may be electricallyconnected with the data line DL. A drain electrode of the thirdtransistor T3 may be electrically connected with a gate electrode of thesecond transistor T2. An electrode of the second transistor T2 may beconnected with a first voltage terminal Vdd, and another electrode ofthe second transistor T2 may be connected with the source electrode 22Sof the first transistor T1. In addition, the drain electrode 22D of thefirst transistor T1 may be electrically connected with the inorganiclight emitting unit 42 (such as being electrically connected with ananode of a light emitting diode in the inorganic light emitting unit42), the gate electrode 18G of the first transistor T1 may be connectedwith a control terminal EM, and a cathode of the light emitting diode inthe inorganic light emitting unit 42 may be connected with a secondvoltage terminal Vss. In some embodiments, the first voltage terminalVdd may be a supply voltage terminal, and the second voltage terminalVss may be a ground voltage terminal, but not limited thereto. In thisembodiment, the control unit CU may be electrically connected with thesecond voltage terminal Vss via the sensing electrode SE because thesensing electrode SE is electrically connected with the control unit CU,but not limited thereto. In the embodiment shown by FIG. 6, the firsttransistor T1, the second transistor T2, and the third transistor T3 maybe p-type transistors, but the present disclosure is not limited tothis. In some embodiments, some of the first transistor T1, the secondtransistor T2, and the third transistor T3 may be p-type transistor(s),and some of the first transistor T1, the second transistor T2, and thethird transistor T3 may be n-type transistor(s). In some embodiments,the first transistor T1, the second transistor T2, and the thirdtransistor T3 may be n-type transistors.

When the sensing electrode SE is electrically connected with the secondvoltage terminal Vss, the touch sensing operation and the displayoperation of the touch display device 101 may be performed by atime-division approach for reducing mutual interference. For example,please refer to FIGS. 6-9, FIG. 1, and FIG. 2. FIG. 7 is a schematictiming diagram of an operation method of the touch display device 101according to an embodiment of the present disclosure, FIG. 8 is aschematic timing diagram of an operation method of the touch displaydevice 101 according to another embodiment of the present disclosure,and FIG. 9 is a schematic timing diagram of a touch sensing signal in anoperation method of the touch display device 101 according to anembodiment of the present disclosure. As shown in FIGS. 1, 2, 6, and 7,a first signal SG1 is a signal applied to the sensing electrode SE, asecond signal SG2 is a signal transmitted from the control terminal EMto the gate electrode 18G of the first transistor T1, a third signal SG3is a signal transmitted by the gate line GL, and a fourth signal SG4 isa signal transmitted by the data line DL. In some embodiments, thedisplay operation may be performed first (such as a period DOP shown inFIG. 7), the first signal SG1 may remain unchanged during the displayoperation (such as being electrically connected with the second voltageterminal Vss), and the second signal SG2, the third signal SG3, and thefourth signal SG4 may be signals for the display operation.Subsequently, in performing the touch sensing operation (such as aperiod TOP shown in FIG. 7), the second signal SG2 may be high electricpotential for closing the first transistor T1, and the first signal SG1under this condition may be a signal for touch sensing withoutinfluencing the inorganic light emitting unit 42. As shown in FIG. 1,FIG. 2, FIG. 6, and FIG. 8, in some embodiments, during the touchsensing operation (such as the period TOP shown in FIG. 8), the voltagemay be pulled up by the second voltage terminal Vss connected with thefirst signal SG1 for turning off the inorganic light emitting unit 42,and the first signal SG1 under this condition may be a signal for touchsensing without influencing the condition of the inorganic lightemitting unit 42. In some embodiments, the frequency of the touchsensing signal may be changed gradually (the frequency may be increasedgradually or decreased gradually) to achieve a spread spectrum effect orto reduce the interference influence generated by the touch sensingsignal. For example, a period of a portion of the touch sensing signalmay be time P, a period of another portion of the touch sensing signalmay be the sum of the time P and time P1, a period of further anotherportion of the touch sensing signal may be the sum of the time P andtime P2, and the time P2 is greater than the time P1 for graduallydecreasing the frequency, but not limited thereto. Additionally, in someembodiments, the waveform of the touch sensing signal may include atrapezoid wave, a triangle wave, a sine wave, etc., for increasinglength of the pull-up period and/or the pull-down period of the touchsensing signal or reducing the harmonic noise at high frequency, but notlimited thereto.

The following description will detail the different embodiments of thepresent disclosure. To simplify the description, identical components ineach of the following embodiments are marked with identical symbols. Formaking it easier to understand the differences between the embodiments,the following description will detail the dissimilarities amongdifferent embodiments and the identical features will not be redundantlydescribed.

Please refer to FIGS. 10-12. FIG. 10 is a schematic diagram illustratinga partial cross-sectional structure of a touch display device 102according to a second embodiment of the present disclosure, FIG. 11 is aschematic diagram illustrating a top view of the touch display device102 according to this embodiment, and FIG. 12 is a schematic diagramillustrating a partial cross-sectional structure of the touch displaydevice 101 according to this embodiment. As shown in FIGS. 10-12, incomparison with the embodiment shown in FIG. 1, the touch display device102 in this embodiment may further include a fifth dielectric layer 44,an electrostatic discharge layer 46, and a conductive layer 50. Theelectrostatic discharge layer 46 may be disposed on the inorganic lightemitting unit 42, and the fifth dielectric layer 44 may be disposedbetween the electrostatic discharge layer 46 and the inorganic lightemitting unit 42. The conductive layer 50 may be disposed on thesubstrate 10, and the electrostatic discharge layer 46 may beelectrically connected with a ground terminal (such as a ground pad 48shown in FIG. 11) via the conductive layer 50, but not limited thereto.Additionally, a sheet resistance of the electrostatic discharge layer 46may range from 10⁸ Ω/square to 10¹¹ Ω/square for reducing the influenceon the touch sensing operation, but not limited thereto. In someembodiments, the fifth dielectric layer 44 may include OCA, OCR, orother suitable transparent dielectric materials. The conductive layer 50may include an electrically conductive adhesive or other suitableconductive materials. The electrostatic discharge layer 46 may includePEDOT or other suitable transparent micro-conductive materials. It isworth noting that the fifth dielectric layer 44, the electrostaticdischarge layer 46, and the conductive layer 50 in this embodiment maybe applied to other embodiments of the present disclosure (such as otherembodiments going to be described below) according to some demands.

Please refer to FIG. 13. FIG. 13 is a schematic diagram illustrating apartial cross-sectional structure of a touch display device 103according to a third embodiment of the present disclosure. Somestructures in this embodiment are similar to those of the firstembodiment shown in FIG. 1, and the similar features will not beredundantly described. The difference between some structures in thisembodiment and those of the first embodiment shown in FIG. 1 is that thesensing electrode SE in the touch display device 103 may be formed of aportion of the fourth conductive layer 30, and the sensing line TL maybe formed of a portion of the second conductive layer 22. In otherwords, the sensing line TL, the source electrode 22S, and the drainelectrode 22D may be formed of an identical layer (such as the secondconductive layer 22), and the sensing electrode SE and one layer in theconductive channel CS (such as the first portion 30A of the fourthconductive layer 30) may be formed of an identical layer. In addition,the third conductive layer 26 in this embodiment may further include asecond portion 26B disposed between the sensing line TL and the sensingelectrode SE for electrically connecting the sensing line TL and thesensing electrode SE. In some embodiments, the sensing line TL may bedisposed on the first dielectric layer 20, and the second portion 26B ofthe third conductive layer 26 may be partly disposed on the seconddielectric layer 24 and partly disposed in an opening penetrating thesecond dielectric layer 24 for being electrically connected with thesensing line TL. The sensing electrode SE may be partly disposed on theplanarization layer 28 and partly disposed in an opening penetrating theplanarization layer 28 for being electrically connected with the secondportion 26B of the third conductive layer 26. In addition, the stackedstructure LS may include a second portion 34B of the fifth conductivelayer 34 disposed between the sensing electrode SE and the inorganiclight emitting unit 42, and the sensing electrode SE may be electricallyconnected with the inorganic light emitting unit 42 via the secondportion 34B of the fifth conductive layer 34. In some embodiments, thesecond portion 34B of the fifth conductive layer 34 may be partlydisposed on the third dielectric layer 32 and partly disposed in anopening penetrating the third dielectric layer 34 for being electricallyconnected with the sensing electrode SE. In addition, the second portion34B of the fifth conductive layer 34 may be electrically connected withthe second voltage terminal Vss shown in FIG. 6 for applyingcorresponding signals (such as ground voltage) to the inorganic lightemitting unit 42, but not limited thereto.

Please refer to FIG. 14. FIG. 14 is a schematic diagram illustrating apartial cross-sectional structure of a touch display device 104according to a fourth embodiment of the present disclosure. As shown inFIG. 14, in the touch display device 104, the first conductive layer 18and at least a part of the stacked structure LS may be may be disposedon and/or near two opposite sides of the substrate 10 (such as the firstside S1 and the second side S2) respectively. For example, the bufferlayer 12, the semiconductor layer 14, the gate dielectric layer 16, thefirst conductive layer 18, the first dielectric layer 20, the secondconductive layer 22, the second dielectric layer 24, and the thirdconductive layer 26 described above may be sequentially disposed onand/or near the first side S1 of the substrate 10, the fourth conductivelayer 30 described above may be partly disposed on and/or near the firstside S1 of the substrate 10 and partly disposed on and/or near thesecond side S2 of the substrate 10, and the third dielectric layer 32,the fifth conductive layer 34, and the inorganic light emitting unit 42may be sequentially disposed on and/or near the second side S2 of thesubstrate 10. The sensing line TL in this embodiment may be formed of aportion of the first conductive layer 18, and the sensing line TL andthe gate electrode 18G may be formed of an identical layer (such as thefirst conductive layer 18) accordingly. In addition, the firstconductive layer 18 may further include a first portion 18A disposed onthe gate dielectric layer 16. The first portion 18A of the firstconductive layer 18 is separated from the gate electrode 18G and thesensing line TL, and the drain electrode 22D of the first transistor T1may be electrically connected with the first portion 18A of the firstconductive layer 18 via the first portion 26A of the third conductivelayer 26, but the present embodiment is not limited to this. In someembodiments, the drain electrode 22D of the first transistor T1 mayextend to at least partly overlap and be electrically connected with thefirst portion 18A of the first conductive layer 18, and the firstportion 26A of the third conductive layer 26 may be omitted accordingly.In this embodiment, the first portion 30A of the fourth conductive layer30 may be partly disposed on and/or near the second side S2 of thesubstrate 10 and partly disposed in an opening penetrating the substrate10, the buffer layer 12, and the gate dielectric layer 16 for beingelectrically connected with the first portion 18A of the firstconductive layer 18 disposed on and/or near the first side S1 of thesubstrate 10. Accordingly, the drain electrode 22D of the firsttransistor T1 may be electrically connected with the inorganic lightemitting unit 42 via the first portion 26A of the third conductive layer26, the first portion 18A of the first conductive layer 18, theconductive channel CS, and the first contact pad 40A.

In addition, the fourth conductive layer 30 in this embodiment mayfurther include a second portion 30B disposed between the sensing lineTL and the sensing electrode SE for electrically connecting the sensingline TL and the sensing electrode SE. The second portion 30B of thefourth conductive layer 30 may be partly disposed on and/or near thesecond side S2 of the substrate 10 and partly disposed in an openingpenetrating the substrate 10, the buffer layer 12, and the gatedielectric layer 16 for being electrically connected with the sensingline TL disposed on and/or near the first side S1 of the substrate 10.In this embodiment, the second portion 30B of the fourth conductivelayer 30 and/or the sensing electrode SE may be used to be electricallyconnected with the second voltage terminal Vss shown in FIG. 6 describedabove, and the inorganic light emitting unit 42 may receivecorresponding signals (such as ground voltage) via the sensing electrodeSE accordingly, but not limited thereto. Additionally, in someembodiments, a conductive material may be formed in the openingpenetrating the substrate 10, the buffer layer 12, and the gatedielectric layer 16 before the step of forming the fourth conductivelayer 30 according to some demands, but not limited thereto.

Please refer to FIG. 15. FIG. 15 is a schematic diagram illustrating apartial cross-sectional structure of a touch display device 105according to a fifth embodiment of the present disclosure. Thisembodiment and the fourth embodiment shown in FIG. 14 are partly similarto each other, and the similar features will not be redundantlydescribed. The difference between some structures in this embodiment andthose of the fourth embodiment shown in FIG. 14 is that, in the touchdisplay device 105, the sensing line TL may be formed of a portion ofthe fourth conductive layer 30, and the sensing line TL and the dataline (such as a data line formed of a portion of the second conductivelayer 22) may be disposed on and/or near different and opposite sides ofthe substrate 10 respectively. The area required for wirings in thenon-display region may be reduced by disposing the sensing line TL andthe data line on and/or near different and opposite sides of thesubstrate 10 respectively, but not limited thereto.

Please refer to FIG. 16. FIG. 16 is a schematic diagram illustrating apartial cross-sectional structure of a touch display device 106according to a sixth embodiment of the present disclosure. Thisembodiment and the fourth embodiment shown in FIG. 14 are partly similarto each other, and the similar features will not be redundantlydescribed. The difference between some structures in this embodiment andthose of the fourth embodiment shown in FIG. 14 is that, in the touchdisplay device 106, the sensing electrode SE may be formed of a portionof the fourth conductive layer 30, and the sensing line TL may be formedof a portion of the first conductive layer 18. In other words, thesensing line TL and the gate electrode 18G in this embodiment may beformed of an identical layer (such as the first conductive layer 18),and the sensing electrode SE and a layer of the conductive channel CS(such as the first portion 30A of the fourth conductive layer 30) may beformed of an identical layer. The sensing electrode SE in thisembodiment may be partly disposed on and/or near the second side S2 ofthe substrate 10 and partly disposed in an opening penetrating thesubstrate 10, the buffer layer 12, and the gate dielectric layer 16 forbeing electrically connected with the sensing line TL disposed on and/ornear the first side S1 of the substrate 10. In this embodiment, thesecond portion 34B of the fifth conductive layer 34 and/or the sensingelectrode SE may be used to be electrically connected with theaforementioned second voltage terminal Vss shown in FIG. 6, and theinorganic light emitting unit 42 may receive corresponding signals (suchas ground voltage) via the second portion 34B of the fifth conductivelayer 34 accordingly, but not limited thereto.

Please refer to FIG. 17. FIG. 17 is a schematic diagram illustrating apartial cross-sectional structure of a touch display device 107according to a seventh embodiment of the present disclosure. Thisembodiment and the fourth embodiment shown in FIG. 14 are partly similarto each other, and the similar features will not be redundantlydescribed. The difference between some structures in this embodiment andthose of the fourth embodiment shown in FIG. 14 is that, in the touchdisplay device 107, the sensing electrode SE may be formed of a portionof the fourth conductive layer 30, and the sensing line TL may be formedof a portion of the second conductive layer 22. In other words, thesensing line TL, the source electrode 22S, and the drain electrode 22Din this embodiment may be formed of an identical layer (such as thesecond conductive layer 22), and the sensing electrode SE and a layer ofthe conductive channel CS (such as the first portion 30A of the fourthconductive layer 30) may be formed of an identical layer. The sensingelectrode SE in this embodiment may be partly disposed on and/or nearthe second side S2 of the substrate 10 and partly disposed in an openingpenetrating the substrate 10, the buffer layer 12, the gate dielectriclayer 16, and the first dielectric layer 20 for being electricallyconnected with the sensing line TL disposed on and/or near the firstside S1 of the substrate 10. Additionally, in some embodiments, aconductive material with better gap-filling capability may be formed inthe opening penetrating the substrate 10, the buffer layer 12, the gatedielectric layer 16, and the first dielectric layer 20 before the stepof forming the fourth conductive layer 30 according to some demands, andthe manufacturing yield of the fourth conductive layer 30 is accordinglyless influenced by the extremely high aspect ratio of the openingpenetrating the substrate 10, the buffer layer 12, the gate dielectriclayer 16, and the first dielectric layer 20, but this disclosure is notlimited thereto.

Please refer to FIG. 18. FIG. 18 is a schematic diagram illustrating apartial cross-sectional structure of a touch display device 108according to an eighth embodiment of the present disclosure. Thisembodiment and the fourth embodiment shown in FIG. 14 are partly similarto each other, and the similar features will not be redundantlydescribed. The difference between some structures in this embodiment andthose of the fourth embodiment shown in FIG. 14 is that, in the touchdisplay device 108, the planarization layer 28, the fourth conductivelayer 30, and the third dielectric layer 32 may be disposed on and/ornear the first side S1 of the substrate 10, and the fifth conductivelayer 34 and the inorganic light emitting unit 42 may be disposed onand/or near the second side S2 of the substrate 10. In other words, thestacked structure LS may be partly disposed on and/or near the firstside S1 of the substrate 10 and partly disposed on and/or near thesecond side S2 of the substrate 10. The sensing electrode SE in thisembodiment may be formed of a portion of the fifth conductive layer 34,and the sensing line TL may be formed of a portion of the firstconductive layer 18. The first portion 34A of the fifth conductive layer34 may be disposed on and/or near the second side S2 of the substrate 10and partly disposed in an opening penetrating the substrate 10, thebuffer layer 12, and the gate dielectric layer 16 for being electricallyconnected with the first portion 18A of the first conductive layer 18disposed on and/or near the first side S1 of the substrate 10. Thesensing electrode SE may be partly disposed on and/or near the secondside S2 of the substrate 10 and partly disposed in an openingpenetrating the substrate 10, the buffer layer 12, and the gatedielectric layer 16 for being electrically connected with the sensingline TL disposed on and/or near the first side S1 of the substrate 10.In addition, the first portion 30A of the fourth conductive layer 30 inthis embodiment may be partly disposed on the planarization layer 28,partly disposed in an opening penetrating the planarization layer 28,and partly disposed in an opening penetrating the planarization layer28, the second dielectric layer 24, and the first dielectric layer 20for electrically connecting the first portion 26A of the thirdconductive layer 26 and the first portion 18A of the first conductivelayer 18. In addition, the first portion 18A of the first conductivelayer 18 in this embodiment may be located between the first portion 34Aof the fifth conductive layer 34 and the first portion 30A of the fourthconductive layer 30, and the drain electrode 22D may be electricallyconnected with the inorganic light emitting unit 42 via the firstportion 26A of the third conductive layer 26, the first portion 30A ofthe fourth conductive layer 30, the first portion 18A of the firstconductive layer 18, the first portion 34A of the fifth conductive layer34, and the first contact pad 40A accordingly, but not limited thereto.In some embodiments, the drain electrode 22D of the first transistor T1may extend to at least partly overlap and be electrically connected withthe first portion 18A of the first conductive layer 18, and the firstportion 26A of the third conductive layer 26 and the first portion 30Aof the fourth conductive layer 30 may be omitted accordingly. In someembodiments, the first portion 26A of the third conductive layer 26 mayextend to at least partly overlap and be electrically connected with thefirst portion 18A of the first conductive layer 18, and the firstportion 30A of the fourth conductive layer 30 may be omittedaccordingly.

Please refer to FIG. 19. FIG. 19 is a schematic diagram illustrating apartial cross-sectional structure of a touch display device 109according to a ninth embodiment of the present disclosure. Thisembodiment and the third embodiment shown in FIG. 13 are partly similarto each other, and the similar features will not be redundantlydescribed. The difference between some structures in this embodiment andthose of the third embodiment shown in FIG. 13 is that, in the touchdisplay device 109, the sensing electrode SE may be formed of a portionof the third conductive layer 26, and the sensing line TL may be formedof a portion of the second conductive layer 22. In addition, the secondportion 30B of the fourth conductive layer 30 may be disposed on thesensing electrode SE, the second portion 34B of the fifth conductivelayer 34 may be disposed on the second portion 30B of the fourthconductive layer 30, and the sensing electrode SE may be electricallyconnected with the inorganic light emitting unit 42 via the secondportion 30B of the fourth conductive layer 30, the second portion 34B ofthe fifth conductive layer 34, and the second contact pad 40B. Inaddition, the sensing electrode SE in this embodiment may be partlydisposed on the second dielectric layer 24 and partly disposed in anopening penetrating the second dielectric layer 24 for beingelectrically connected with the sensing line TL disposed on the firstdielectric layer 20. In this embodiment, the second portion 34B of thefifth conductive layer 34 and/or the second portion 30B of the fourthconductive layer 30 may be used to be electrically connected with theaforementioned second voltage terminal Vss shown in FIG. 6, and theinorganic light emitting unit 42 may receive corresponding signals (suchas ground voltage) via the second portion 34B of the fifth conductivelayer 34 accordingly, but not limited thereto.

It is worth noting that, in the embodiments (such as the embodimentsdescribed above) where the sensing electrode SE is electricallyconnected with the inorganic light emitting unit 42, the inorganic lightemitting unit 42 may be electrically connected with the second voltageterminal Vss shown in FIG. 6 described above via the sensing electrodeSE, a portion of the fifth conductive layer 34 and/or a portion of thefourth conductive layer 30, and the inorganic light emitting unit 42 mayreceive corresponding signals (such as ground voltage) accordingly, butnot limited thereto.

Please refer to FIG. 20. FIG. 20 is a schematic diagram illustrating apartial cross-sectional structure of a touch display device 110according to a tenth embodiment of the present disclosure. Thisembodiment and the first embodiment shown in FIG. 1 are partly similarto each other, and the similar features will not be redundantlydescribed. The difference between some structures in this embodiment andthose of the first embodiment shown in FIG. 1 is that, in the touchdisplay device 110, the sensing electrode SE may be formed of a portionof the fifth conductive layer 34, the sensing line TL may be formed of aportion of the fourth conductive layer 30, and the sensing electrode SEmay not be electrically connected with the inorganic light emitting unit42. In addition, the second portion 34B of the fifth conductive layer 34and the second portion 30B of the fourth conductive layer 30electrically connected with the inorganic light emitting unit 42 may beelectrically separated from the sensing electrode SE, and the touchsensing operation and the display operation of the touch display device110 may not be performed by a time-division approach, but not limitedthereto. Additionally, in some embodiments which are not shown in thefigures, in the condition that the sensing electrode SE is notelectrically connected with the inorganic light emitting unit 42, thesensing electrode SE may be formed of a portion of the fourth conductivelayer 30, the sensing line TL may be formed of a portion of the secondconductive layer 22, and the second portion of the third dielectriclayer 26 may be disposed between the sensing line TL and the sensingelectrode SE for electrically connecting the sensing line TL and thesensing electrode SE (such as the condition shown in FIG. 13).Additionally, in some embodiments, in the condition that the sensingelectrode SE is not electrically connected with the inorganic lightemitting unit 42, the sensing electrode SE may be formed of a portion ofthe third conductive layer 26, the sensing line TL may be formed of aportion of the second conductive layer 22 (such as the condition shownin FIG. 19 described above), but the second portion 34B of the fifthconductive layer 34 electrically connected with the inorganic lightemitting unit 42 and the second portion 30B of the fourth conductivelayer 30 electrically connected with the inorganic light emitting unit42 may be electrically separated from the sensing electrode SE and thesensing line TL.

Please refer to FIG. 21. FIG. 21 is a schematic diagram illustrating apartial cross-sectional structure of a touch display device 111according to an eleventh embodiment of the present disclosure. Thisembodiment and the fourth embodiment shown in FIG. 14 are partly similarto each other, and the similar features will not be redundantlydescribed. The difference between some structures in this embodiment andthose of the fourth embodiment shown in FIG. 14 is that, in the touchdisplay device 111, the sensing line TL may be formed of a portion ofthe first conductive layer 18, the sensing electrode SE may be formed ofa portion of the fifth conductive layer 34, and the sensing electrode SEmay not be electrically connected with the inorganic light emitting unit42. In additional, the fourth conductive layer 30 may further include athird portion 30C disposed between the sensing line TL and the sensingelectrode SE for electrically connecting the sensing line TL and thesensing electrode SE. In some embodiments, the first conducive layer 18may further include a second portion 18B electrically separated from thefirst portion 18A of the first conductive layer 18 and the sensing lineTL, and the second portion 18B of the first conductive layer 18 may beelectrically connected with the inorganic light emitting unit 42 via thesecond portion 30B of the fourth conductive layer 30, the second portion34B of the fifth conductive layer 34, and the second contact pad 40B,but not limited thereto. In this embodiment, the second portion 18B ofthe first conductive layer 18, the second portion 30 of the fourthconductive layer 30, and/or the second portion 34B of the fifthconductive layer 34 may be used to be electrically connected with thesecond voltage terminal Vss shown in FIG. 6 described above, and theinorganic light emitting unit 42 may receive corresponding signals (suchas ground voltage) accordingly, but not limited thereto.

In some embodiments which are not shown in the figures, in the conditionthat the sensing electrode SE is not electrically connected with theinorganic light emitting unit 42, the sensing electrode SE may be formedof a portion of the fifth conductive layer 34, and the sensing line TLmay be formed of a portion of the fourth conductive layer 30 (such asthe condition shown in FIG. 20 described above). In some embodiments, inthe condition that the sensing electrode SE is not electricallyconnected with the inorganic light emitting unit 42 and the conditionthat the first transistor T1 and the inorganic light emitting unit 42are disposed on and/or near different and opposite sides of thesubstrate 10 respectively, the sensing electrode SE may be formed of aportion of the fourth conductive layer 30, and the sensing line TL maybe formed of a portion of the first conductive layer 18 (such as thecondition shown in FIG. 16). In some embodiments, in the condition thatthe sensing electrode SE is not electrically connected with theinorganic light emitting unit 42 and the condition that the firsttransistor T1 and the inorganic light emitting unit 42 are disposed onand/or near different and opposite sides of the substrate 10respectively, the sensing electrode SE may be formed of a portion of thefourth conductive layer 30, and the sensing line TL may be formed of aportion of the second conductive layer 22 (such as the condition shownin FIG. 17 described above).

Please refer to FIG. 22. FIG. 22 is a schematic diagram illustrating apartial cross-sectional structure of a touch display device 112according to a twelfth embodiment of the present disclosure. As shown inFIG. 22, in the touch display device 112, the buffer layer 12, thesemiconductor layer 14, the gate dielectric layer 16, the firstconductive layer 18, the first dielectric layer 20, the secondconductive layer 22, the second dielectric layer 24, and the thirdconductive layer 26, the planarization layer 28, the fourth conductivelayer 30, and the third dielectric layer 32 may be sequentially disposedon and/or near the first side S1 of the substrate 10, and the fifthconductive layer 34 and the inorganic light emitting unit 42 may besequentially disposed on and/or near the second side S2 of the substrate10. In other words, the stacked structure LS may be partly disposed onand/or near the first side S1 of the substrate 10 and partly disposed onand/or near the second side S2 of the substrate 10. The sensingelectrode SE in this embodiment may be formed of a portion of the fifthconductive layer 34, the sensing line TL may be formed of a portion ofthe first conductive layer 18, and the sensing electrode SE may not beelectrically connected with the inorganic light emitting unit 42. Insome embodiments, the second portion 18B of the first conductive layer18 may be electrically connected with the second portion 34B of thefifth conductive layer 34 directly, and the second portion 18 of thefirst conductive layer 18 and/or the second portion 34B of the fifthconductive layer 34 may be used to be electrically connected with thesecond voltage terminal Vss shown in FIG. 6 described above, and theinorganic light emitting unit 42 may receive corresponding signals (suchas ground voltage) accordingly, but not limited thereto.

To summarize the above descriptions, the sensing electrode and thesensing line with touch sensing functions may be integrated into theinorganic light emitting display device, and the purposes of thicknessreduction, process integration, and/or production cost reduction may beachieved accordingly. In addition, the sensing electrode may beelectrically connected with or electrically separated from the inorganiclight emitting unit according to some demands, and suitable drivingapproaches may be applied to improve the performances of the touchsensing operation and/or the display operation of the touch displaydevice.

Although the embodiments and advantages thereof in the presentdisclosure have been disclosed as above, it should be understood thatanyone with ordinary knowledge in the related technical field can makechanges, substitutions, and decorations without departing from thespirit and the scope of this disclosure. Additionally, the scope of theprotected range of this disclosure is not limited to the processes,machines, manufacturing, material compositions, devices, methods, andsteps in the specific embodiments described in the description. Anyperson with ordinary knowledge in the related technical field mayunderstand the current or future development of processes, machines,manufacturing, material composition, devices, methods and steps from thedisclosed contents in this disclosure, as long as the substantially samefunctions carried out in the described embodiments or the substantiallysame results obtained in the described embodiments may be used inaccordance with the present disclosure. Therefore, the protection scopeof the present disclosure includes the above-mentioned processes,machines, manufacturing, material composition, devices, methods andsteps. Additionally, each claim constitutes a separate embodiment, andthe protection scope of the present disclosure also includes acombination of the claims and the embodiments. The protection scope ofthe present disclosure shall be determined by the scope of the claimslisted below.

Those skilled in the art will readily observe that numerousmodifications and alterations of the device and method may be made whileretaining the teachings of the disclosure. Accordingly, the abovedisclosure should be construed as limited only by the metes and boundsof the appended claims.

What is claimed is:
 1. A touch display device, comprising: a substrate;a first conductive layer disposed on the substrate, wherein the firstconductive layer comprises a gate electrode; a second conductive layerdisposed on the first conductive layer, wherein the second conductivelayer comprises a source electrode and a drain electrode; a stackedstructure disposed on the substrate, wherein the staked structurecomprises a conductive channel and a sensing electrode; an inorganiclight emitting unit disposed on the stacked structure, wherein theinorganic light emitting unit is electrically connected with the drainelectrode via the conductive channel; and a touch sensing circuitelectrically connected with the sensing electrode.
 2. The touch displaydevice according to claim 1, wherein the sensing electrode iselectrically connected with the inorganic light emitting unit.
 3. Thetouch display device according to claim 1, wherein the sensing electrodeis not electrically connected with the inorganic light emitting unit. 4.The touch display device according to claim 1, wherein the conductivechannel comprises a first layer and a second layer, the second layer isdisposed on the first layer, and the sensing electrode and one of thefirst layer or the second layer are formed of an identical layer.
 5. Thetouch display device according to claim 1, further comprising: a sensingline disposed under the sensing electrode, wherein the touch sensingcircuit is electrically connected with the sensing electrode via thesensing line.
 6. The touch display device according to claim 5, whereinthe sensing electrode comprises a slit, and the slit overlaps thesensing line in a thickness direction of the substrate.
 7. The touchdisplay device according to claim 5, wherein the sensing line and one ofthe gate electrode, the source electrode, or the drain electrode areformed of an identical layer.
 8. The touch display device according toclaim 5, wherein the sensing line and a part of the conductive channelare formed of an identical layer.
 9. The touch display device accordingto claim 1, further comprising: an electrostatic discharge layerdisposed on the inorganic light emitting unit, wherein a sheetresistance of the electrostatic discharge layer ranges from 10⁸ Ω/squareto 10¹¹ Ω/square.
 10. The touch display device according to claim 9,wherein the electrostatic discharge layer is electrically connected witha ground terminal.
 11. The touch display device according to claim 10,further comprising: a dielectric layer disposed between theelectrostatic discharge layer and the inorganic light emitting unit; anda third conductive layer disposed on the substrate, wherein theelectrostatic discharge layer is electrically connected with the groundterminal via the third conductive layer.
 12. The touch display deviceaccording to claim 1, wherein the substrate has a first side and asecond side opposite to the first side in a thickness direction of thesubstrate, the first conductive layer is disposed on the first side ofthe substrate, and the inorganic light emitting unit is disposed on thesecond side of the substrate.
 13. The touch display device according toclaim 12, wherein the conductive channel is partly disposed on the firstside of the substrate and partly disposed on the second side of thesubstrate.
 14. The touch display device according to claim 12, wherein apart of the conductive channel penetrates the substrate.
 15. The touchdisplay device according to claim 12, wherein at least a part of thesensing electrode is disposed on the second side of the substrate. 16.The touch display device according to claim 15, further comprising: asensing line disposed on the first side of the substrate, wherein thetouch sensing circuit is electrically connected with the sensingelectrode via the sensing line.
 17. The touch display device accordingto claim 16, wherein a part of the sensing electrode penetrates thesubstrate.
 18. The touch display device according to claim 15, furthercomprising: a sensing line disposed on the second side of the substrate,wherein the touch sensing circuit is electrically connected with thesensing electrode via the sensing line.
 19. The touch display deviceaccording to claim 1, wherein the substrate has two opposite sides, andthe first conductive layer and the stacked structure are respectivelydisposed on the two opposite sides.
 20. The touch display deviceaccording to claim 1, wherein the inorganic light emitting unit iselectrically connected with a ground voltage terminal via the sensingelectrode.